Nozzle for vapor-phase epitaxial equipment



FIG. 1 is a perspective view of a nozzle for vapor-phase epitaxial equipment, showing my new design;

FIG. 2 is a left side elevational view thereof;

FIG. 3 is a front side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a section view taken on line A–A′ of FIG. 4; and,

FIG. 8 is an enlarged fragmentary view framed by lines B–B and B′–B′ of FIG. 3. 

The ornamental design for a nozzle for vapor-phase epitaxial equipment, as shown and described. 